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Ultra high ƙuduri filin fitar da binciken lantarki microscope SU8600 jerin
Tare da ci gaban saurin tattara bayanai da fasahohin sarrafa bayanai, microscope na lantarki ya shiga zamanin da ba kawai ya daraja ingancin bayanai b
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Ultra high ƙuduri filin fitar da binciken lantarki microscope SU8600 jerin
Tare da ci gaban saurin tattara bayanai da fasahohin sarrafa bayanai, microscope na lantarki ya shiga zamanin da ba kawai ya daraja ingancin bayanai ba, har ma da tsarin tattara su. SU8600 jerin ya bi da ingancin hoto mai inganci na Regulus8200 jerin, babban binciken ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoyin ƙwayoy
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- Na'urar hotuna sun ƙunshi zaɓuɓɓuka.
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Bayani
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Ultra high ƙuduri hoto
Matsayin lantarki mai haske na Hitachi yana tabbatar da hotuna masu ƙuduri koda a ƙarƙashin ƙarancin ƙarfin lantarki.
An lura da misali na nau'in zeolite na RHO a cikin yanayin ƙarfin lantarki na 0.8 kV. Hoton hagu shine cikakken siffar ƙwayoyin, hoton dama shine hoton girma, tsarin matakai na ƙwayoyin yana bayyana a fili. Low ƙarfin lantarki lura ne mafi inganci don rage electron beam lalacewa da kuma samun surface siffar bayanai.
Samfurin da aka bayar: Cibiyar Bincike ta Masana'antu ta Masana'antu ta Japan
Low hanzari ƙarfin lantarki baya warwatsa image da high liner
3D NAND sashe lura;
A ƙarƙashin yanayin ƙarfin lantarki mai ƙarancin hanzari, siginar lantarki mai watsawa na iya nuna bambancin liner tsakanin layers na silicon oxide da layers na silicon nitride.
3D NAND sashe lura (hanzarta ƙarfin lantarki: 1.5kV)
Hoton BSE mai sauri: Sabon mai gano lantarki mai watsawa (OCD)*
Saboda amfani da sabon nau'in OCD detector, har yanzu ana iya lura da hotunan zurfin tsarin Fin-FET ko da lokacin bincike na ƙasa da dakika ɗaya.
Kulawa da tsarin ciki na 5nm tsari SRAM (hanzarta ƙarfin lantarki: 30kV, lokacin bincike <1s)
Advanced sarrafa kansa fasali*
EM Flow Creator yana ba abokan ciniki damar ƙirƙirar aikin sarrafa kansa don tattara hotuna masu ci gaba. EM Flow Creator ya bayyana daban-daban SEM ayyuka a matsayin zane-zane kayan aiki kamar saita zoom, motsi samfurin matsayi, daidaita mayar da hankali da haske da duhu bambanci da sauransu. Mai amfani zai iya jawo ta hanyar linzamin kwamfuta mai sauki don haɗa waɗannan kayan aiki a cikin tsari mai ma'ana. Bayan debugging da tabbatarwa, shirin zai iya samun ingancin hoto mai kyau a kowane kira ta atomatik.
Flexible mai amfani dubawa
Asali goyon bayan dual nuni, samar da sassauci, ingantaccen aiki sarari. 6 tashoshi a lokaci guda nuna da kuma adana, samun sauri multi siginar lura da kuma karɓar.
Za a iya nuna siginar tashar 1, 2, 4 ko 6 a lokaci guda a kan nuni guda ɗaya, kuma abubuwan da za a iya canzawa sun haɗa da SEM daban-daban masu ganowa da kyamarorin ɗakin samfurin da kyamarorin kewayawa. Ana iya fadada sararin aiki ta hanyar amfani da nuni biyu, mai amfani da dubawa mai musamman don haɓaka aikin aiki.
Bayani
| samfurin | SU8600 jerin | |
|---|---|---|
| Electronic gani tsarin | Biyu Electronic kamar ƙuduri | 0.6 nm@15 kV |
| 0.7 nm@1 kV * | ||
| Ƙara girma | 20 to 2,000,000 x | |
| Gun na lantarki | A sanyi filin fitar da lantarki tushen, goyon bayan m walƙiya aiki, ƙunshi da anode gashi tsarin. | |
| hanzarta ƙarfin lantarki | 0.5 to 30 kV | |
| Saukar da ƙarfin lantarki | 0.01 to 20 kV | |
| Mai bincike | (wani ɓangare ne zaɓi) | Mai ganowa (UD) |
| UD ExB makamashi tace tare da SE / BSE siginar cakuda aiki | ||
| ƙasa Mai bincike (LD) | ||
| Top Mai bincike (TD) | ||
| TD makamashi tace | ||
| Mai binciken lantarki mai watsawa a cikin madubi (IMD) | ||
| Mai binciken lantarki na Semiconductor (PD-BSED) | ||
| Sabon mai binciken lantarki mai watsawa (OCD) | ||
| Mai ganowa na cathode fluorescence (CLD) | ||
| Mai binciken STEM | ||
| Abubuwan haɗi | (wani ɓangare ne zaɓi) | Kwamarar kewayawa, Kwamarar ɗakin samfurin, X-ray Energy Spectrometer (EDS), Mai binciken watsawa na lantarki (EBSD) |
| software | (wani ɓangare ne zaɓi) | EM Flow Creator、HD Kama (har zuwa 40,960 × 30,720 pixels) |
| Samfurin tebur | Mota drive shaft | 5 axis mota tuki (X / Y / R / Z / T) |
| Mota drive shaft | X：0~110 mm | |
| Y：0~110 mm | ||
| Z：1.5~40 mm | ||
| T：-5~70° | ||
| R：360° | ||
| Samfurin dakin | Samfurin girma | Max diamita: 150 mm |
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- A cikin yanayin rage
Related kayayyakin Categories
- Mai da hankali kan tsarin ion beam (FIB / FIB-SEM)
- TEM / SEM samfurin kafin sarrafawa na'urar
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